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IMEC begins construction of 300mm clean room

Based on a 2002 detailed engineering study and positive signals from the industry and local government to support IMEC's 300mm silicon research platform initiative, IMEC's board of directors has today announced the construction of a new 300mm clean room.



Construction of the new 2.200m2 clean room will begin in February 2003, with completion due in approximately 18 months. The facility is expected to go on-line in mid 2005, with activities gradually ramping up. The initiative involves an investment of 84 million euro of which 37.184 million euro has been granted by local government.

The new clean room will be located adjacent to IMEC's existing facilities to ensure and optimize the exchange of information and to share common facilities, infrastructure and metrology tools.

IMEC will set up several research programs targeting the most important issues identified by the International Technology Roadmap for Semiconductors for the sub-45nm node. The focus will be on EUV lithography, new materials, advanced devices and innovative interconnect schemes. The programs will be open for semiconductor companies and material and equipment suppliers worldwide.

"We've received very strong signals from the industry worldwide that they wish to continue collaboration with IMEC in pioneering research for the 300mm era," said Prof. Gilbert Declerck, President and CEO of IMEC. "This 300mm research facility will allow us to fulfill the requests by the industry to perform world-class research on the most advanced process steps, materials and devices for the sub-45nm node and around, above and beside CMOS."

About IMEC

IMEC was founded in 1984 and today is Europe's largest independent research center in the field of microelectronics, nanotechnology, enabling design methods and technologies for ICT systems. IMEC's activities concentrate on the design technology for integrated information and communication systems; silicon process steps and modules, silicon processes; nanotechnology, microsystems, components and packaging; solar cells; and advanced training in microelectronics. IMEC is headquartered in Leuven, Belgium, and has a staff of more than 1250 people including over 380 industrial residents and guest researchers. Its revenue of more than 130Meuro is derived from agreements and contracts with the Flemish government and companies, equipment and material suppliers and semiconductor and system-oriented companies worldwide, the EC, MEDEA+ and ESA. News from IMEC is located at www.imec.be.

For more information:

Katrien Marent

Corporate Communication Manager

IMEC

Kapeldreef 75 B- 3001 Leuven, Belgium

Tel +32 16 28 18 80 Fax +32 16 28 16 37

Email: Katrien.Marent@imec.be

Reported by
FIT
29 January 2003

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